Patent Assignment Details
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| Reel/Frame: | 026067/0142 | |
| Pages: | 4 |
| | Recorded: | 04/04/2011 | | |
| Attorney Dkt #: | MAPS-47749 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/12/2013
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Application #:
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13035010
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Filing Dt:
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02/25/2011
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Publication #:
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Pub Dt:
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09/01/2011
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Title:
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SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING PROGRAM FOR EXECUTING THE SAME, SUBSTRATE PROCESSING APPARATUS, AND FAULT DETECTION METHOD FOR DIFFERENTIAL PRESSURE FLOWMETER
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Assignee
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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PEARNE & GORDON LLP
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1801 E. 9TH STREET, SUITE 1200
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CLEVELAND, OH 44114
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