Patent Assignment Details
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| Reel/Frame: | 026807/0688 | |
| Pages: | 6 |
| | Recorded: | 08/25/2011 | | |
| Attorney Dkt #: | 5649-3317 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/01/2014
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Application #:
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13217699
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Filing Dt:
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08/25/2011
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Publication #:
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Pub Dt:
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03/15/2012
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Title:
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PLASMA GENERATING UNITS AND PROCESS MONITORING DEVICES AND SEMICONDUCTOR PROCESS APPARATUS INCLUDING THE SAME
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Assignee
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| 416 MAETAN-DONG, YEONGTONGPGU, SUWON-SI |
| GYEONGGI-DO, KOREA, REPUBLIC OF |
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Correspondence name and address
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MYERS BIGEL SIBLEY & SAJOVEC
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PO BOX 37428
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RALEIGH, NC 27627
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