Patent Assignment Details
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| Reel/Frame: | 027868/0046 | |
| Pages: | 11 |
| | Recorded: | 03/15/2012 | | |
| Attorney Dkt #: | 02887.0802 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/08/2014
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Application #:
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13420870
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Filing Dt:
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03/15/2012
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Publication #:
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Pub Dt:
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01/24/2013
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Title:
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SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCRITICAL DRYING APPARATUS
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Assignees
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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| 3-1, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW, GARRETT &
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20001-4413
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