Patent Assignment Details
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| Reel/Frame: | 029295/0330 | |
| Pages: | 6 |
| | Recorded: | 11/14/2012 | | |
| Attorney Dkt #: | TEA-083US2 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/19/2016
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Application #:
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13676265
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Filing Dt:
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11/14/2012
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Publication #:
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Pub Dt:
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05/16/2013
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Title:
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RADIO FREQUENCY (RF) POWER COUPLING SYSTEM UTILIZING MULTIPLE RF POWER COUPLING ELEMENTS FOR CONTROL OF PLASMA PROPERTIES
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Assignee
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| AKASAKA BIZ TOWER |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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WOOD, HERRON & EVANS, LLP
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441 VINE STREET
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SUITE 2700
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CINCINNATI, OH 45202
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