Patent Assignment Details
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| Reel/Frame: | 029787/0236 | |
| Pages: | 3 |
| | Recorded: | 02/11/2013 | | |
| Attorney Dkt #: | TEA-047US1/ELECP104USA |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/03/2014
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Application #:
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13763797
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Filing Dt:
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02/11/2013
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Publication #:
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Pub Dt:
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06/13/2013
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Title:
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METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICONDUCTOR MANUFACTURING TOOL
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Assignee
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TUROCY & WATSON, LLP
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127 PUBLIC SQUARE
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57TH FLOOR, KEY TOWER
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CLEVELAND, OH 44114
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