Patent Assignment Details
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| Reel/Frame: | 030716/0969 | |
| Pages: | 6 |
| | Recorded: | 07/01/2013 | | |
| Attorney Dkt #: | TEA-066US1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/29/2016
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Application #:
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13829959
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Filing Dt:
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03/14/2013
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Publication #:
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Pub Dt:
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10/17/2013
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Title:
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LOW ELECTRON TEMPERATURE, EDGE-DENSITY ENHANCED, SURFACE WAVE PLASMA (SWP) PROCESSING METHOD AND APPARATUS
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Assignee
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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WOOD, HERRON & EVANS, LLP
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441 VINE STREET
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SUITE 2700
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CINCINNATI, OH 45202
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