Patent Assignment Details
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Reel/Frame: | 032474/0466 | |
| Pages: | 5 |
| | Recorded: | 03/19/2014 | | |
Attorney Dkt #: | 1022.0041C |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/24/2016
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Application #:
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14219345
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Filing Dt:
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03/19/2014
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Publication #:
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Pub Dt:
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09/25/2014
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Title:
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Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System and Non-Transitory Computer-Readable Recording Medium
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Assignee
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14-1, SOTOKANDA 4-CHOME |
CHIYODA-KU |
TOKYO, JAPAN 1018980 |
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Correspondence name and address
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PATRICK J. FINNAN
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9801 WASHINGTONIAN BLVD.
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SUITE 750
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GAITHERSBURG, MD 20878
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