Patent Assignment Details
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| Reel/Frame: | 034547/0013 | |
| Pages: | 7 |
| | Recorded: | 12/18/2014 | | |
| Attorney Dkt #: | TTL-242US1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/15/2018
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Application #:
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14530164
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Filing Dt:
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10/31/2014
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Publication #:
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Pub Dt:
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05/07/2015
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Title:
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SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA PROCESSING
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Assignee
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| 3-1 AKASAKA 5-CHOME |
| AKASAKA BIZ TOWER |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2400 GROVE BLVD.
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AUSTIN, TX 78741
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