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Total properties:
26
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|
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|
Patent #:
|
|
Issue Dt:
|
01/31/2012
|
Application #:
|
12175271
|
Filing Dt:
|
07/17/2008
|
|
Publication #:
|
|
Pub Dt:
|
01/21/2010
| | | | |
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Title:
|
NEURAL NETWORK BASED HERMITE INTERPOLATOR FOR SCATTEROMETRY PARAMETER ESTIMATION
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/18/2017
|
Application #:
|
12193341
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Filing Dt:
|
08/18/2008
|
|
Publication #:
|
|
Pub Dt:
|
02/18/2010
| | | | |
|
Title:
|
COMPUTATION EFFICIENCY BY DIFFRACTION ORDER TRUNCATION
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/15/2013
|
Application #:
|
12331192
|
Filing Dt:
|
12/09/2008
|
|
Publication #:
|
|
Pub Dt:
|
06/10/2010
| | | | |
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Title:
|
RATIONAL APPROXIMATION AND CONTINUED-FRACTION APPROXIMATION APPROACHES FOR COMPUTATION EFFICIENCY OF DIFFRACTION SIGNALS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/05/2012
|
Application #:
|
12340421
|
Filing Dt:
|
12/19/2008
|
|
Publication #:
|
|
Pub Dt:
|
06/24/2010
| | | | |
|
Title:
|
HYBRID DIFFRACTION MODELING OF DIFFRACTING STRUCTURES
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12775392
|
Filing Dt:
|
05/06/2010
|
|
Publication #:
|
|
Pub Dt:
|
11/10/2011
| | | | |
|
Title:
|
DETERMINATION OF MATERIAL OPTICAL PROPERTIES FOR OPTICAL METROLOGY OF STRUCTURES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/20/2016
|
Application #:
|
12785310
|
Filing Dt:
|
05/21/2010
|
|
Publication #:
|
|
Pub Dt:
|
11/24/2011
| | | | |
|
Title:
|
COMPUTATION EFFICIENCY BY ITERATIVE SPATIAL HARMONICS ORDER TRUNCATION
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/28/2013
|
Application #:
|
12813431
|
Filing Dt:
|
06/10/2010
|
|
Publication #:
|
|
Pub Dt:
|
12/15/2011
| | | | |
|
Title:
|
DETERMINATION OF TRAINING SET SIZE FOR A MACHINE LEARNING SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/04/2014
|
Application #:
|
12841932
|
Filing Dt:
|
07/22/2010
|
|
Publication #:
|
|
Pub Dt:
|
01/26/2012
| | | | |
|
Title:
|
METHOD FOR AUTOMATED DETERMINATION OF AN OPTIMALLY PARAMETERIZED SCATTEROMETRY MODEL
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/19/2016
|
Application #:
|
12900863
|
Filing Dt:
|
10/08/2010
|
|
Publication #:
|
|
Pub Dt:
|
04/12/2012
| | | | |
|
Title:
|
METHOD OF DETERMINING AN ASYMMETRIC PROPERTY OF A STRUCTURE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/19/2013
|
Application #:
|
13025654
|
Filing Dt:
|
02/11/2011
|
|
Publication #:
|
|
Pub Dt:
|
08/16/2012
| | | | |
|
Title:
|
WIDE PROCESS RANGE LIBRARY FOR METROLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/05/2013
|
Application #:
|
13041253
|
Filing Dt:
|
03/04/2011
|
|
Publication #:
|
|
Pub Dt:
|
09/06/2012
| | | | |
|
Title:
|
Accurate and Fast Neural network Training for Library-Based Critical Dimension (CD) Metrology
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2016
|
Application #:
|
13164398
|
Filing Dt:
|
06/20/2011
|
|
Publication #:
|
|
Pub Dt:
|
12/20/2012
| | | | |
|
Title:
|
OPTIMIZING AN OPTICAL PARAMETRIC MODEL FOR STRUCTURAL ANALYSIS USING OPTICAL CRITICAL DIMENSION (OCD) METROLOGY
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13286079
|
Filing Dt:
|
10/31/2011
|
|
Publication #:
|
|
Pub Dt:
|
05/02/2013
| | | | |
|
Title:
|
PROCESS VARIATION-BASED MODEL OPTIMIZATION FOR METROLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/24/2014
|
Application #:
|
13371317
|
Filing Dt:
|
02/10/2012
|
|
Title:
|
NUMERICAL APERTURE INTEGRATION FOR OPTICAL CRITICAL DIMENSION (OCD) METROLOGY
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
13610613
|
Filing Dt:
|
09/11/2012
|
|
Publication #:
|
|
Pub Dt:
|
06/20/2013
| | | | |
|
Title:
|
LIBRARY GENERATION WITH DERIVATIVES IN OPTICAL METROLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/11/2014
|
Application #:
|
13656487
|
Filing Dt:
|
10/19/2012
|
|
Publication #:
|
|
Pub Dt:
|
08/15/2013
| | | | |
|
Title:
|
NUMERICAL APERTURE INTEGRATION FOR OPTICAL CRITICAL DIMENSION (OCD) METROLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/08/2015
|
Application #:
|
13712734
|
Filing Dt:
|
12/12/2012
|
|
Publication #:
|
|
Pub Dt:
|
06/20/2013
| | | | |
|
Title:
|
TECHNIQUES FOR OPTIMIZED SCATTEROMETRY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/09/2019
|
Application #:
|
13781474
|
Filing Dt:
|
02/28/2013
|
|
Publication #:
|
|
Pub Dt:
|
10/03/2013
| | | | |
|
Title:
|
MODEL OPTIMIZATION APPROACH BASED ON SPECTRAL SENSITIVITY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/06/2016
|
Application #:
|
13889655
|
Filing Dt:
|
05/08/2013
|
|
Title:
|
OPTICAL PARAMETRIC MODEL OPTIMIZATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/28/2017
|
Application #:
|
14044729
|
Filing Dt:
|
10/02/2013
|
|
Publication #:
|
|
Pub Dt:
|
01/30/2014
| | | | |
|
Title:
|
ACCURATE AND FAST NEURAL NETWORK TRAINING FOR LIBRARY-BASED CRITICAL DIMENSION (CD) METROLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/22/2016
|
Application #:
|
14170150
|
Filing Dt:
|
01/31/2014
|
|
Publication #:
|
|
Pub Dt:
|
08/07/2014
| | | | |
|
Title:
|
METHOD OF ELECTROMAGNETIC MODELING OF FINITE STRUCTURES AND FINITE ILLUMINATION FOR METROLOGY AND INSPECTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/20/2019
|
Application #:
|
14293221
|
Filing Dt:
|
06/02/2014
|
|
Publication #:
|
|
Pub Dt:
|
12/04/2014
| | | | |
|
Title:
|
DYNAMIC REMOVAL OF CORRELATION OF HIGHLY CORRELATED PARAMETERS FOR OPTICAL METROLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/2021
|
Application #:
|
14293625
|
Filing Dt:
|
06/02/2014
|
|
Publication #:
|
|
Pub Dt:
|
12/04/2014
| | | | |
|
Title:
|
AUTOMATIC WAVELENGTH OR ANGLE PRUNING FOR OPTICAL METROLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/19/2019
|
Application #:
|
14293809
|
Filing Dt:
|
06/02/2014
|
|
Publication #:
|
|
Pub Dt:
|
12/04/2014
| | | | |
|
Title:
|
AUTOMATIC DETERMINATION OF FOURIER HARMONIC ORDER FOR COMPUTATION OF SPECTRAL INFORMATION FOR DIFFRACTION STRUCTURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/13/2018
|
Application #:
|
14294540
|
Filing Dt:
|
06/03/2014
|
|
Title:
|
OPTIMIZED SPATIAL MODELING FOR OPTICAL CD METROLOGY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/19/2021
|
Application #:
|
14542546
|
Filing Dt:
|
11/15/2014
|
|
Publication #:
|
|
Pub Dt:
|
05/21/2015
| | | | |
|
Title:
|
AUTOMATIC SELECTION OF SAMPLE VALUES FOR OPTICAL METROLOGY
|
|
