Patent Assignment Details
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| Reel/Frame: | 035074/0213 | |
| Pages: | 6 |
| | Recorded: | 03/03/2015 | | |
| Attorney Dkt #: | TTCA-457US3-ORD1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/31/2019
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Application #:
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14635806
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Filing Dt:
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03/02/2015
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Publication #:
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Pub Dt:
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09/03/2015
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Title:
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METHOD OF ENHANCING HIGH-k FILM NUCLEATION RATE AND ELECTRICAL MOBILITY IN A SEMICONDUCTOR DEVICE BY MICROWAVE PLASMA TREATMENT
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Assignee
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2400 GROVE BLVD.
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AUSTIN, TX 78741
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