Patent Assignment Details
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Reel/Frame: | 035097/0370 | |
| Pages: | 4 |
| | Recorded: | 03/05/2015 | | |
Attorney Dkt #: | 15-107 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/13/2016
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Application #:
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14616672
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Filing Dt:
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02/07/2015
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Publication #:
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Pub Dt:
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08/13/2015
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Title:
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PLASMA METHOD FOR REDUCING POST-LITHOGRAPHY LINE WIDTH ROUGHNESS
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Assignees
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KAPELDREEF 75 |
LEUVEN, BELGIUM 3001 |
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WAAISTRAAT 6 |
BOX 5105 |
LEUVEN, BELGIUM 3000 |
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Correspondence name and address
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MCDONNELL BOEHNEN HULBERT & BERGHOFF LLP
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300 SOUTH WACKER DRIVE
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CHICAGO, IL 60606
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06/01/2024 01:23 AM
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