Patent Assignment Details
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| Reel/Frame: | 038418/0479 | |
| Pages: | 3 |
| | Recorded: | 04/29/2016 | | |
| Attorney Dkt #: | HITACHI18-0000996US02 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/23/2018
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Application #:
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15141580
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Filing Dt:
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04/28/2016
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Publication #:
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Pub Dt:
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08/18/2016
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Title:
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SUBSTRATE PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM THEREOF AND SEMICONDUCTOR MANUFACTURING METHOD BY EMPLOYING THEREOF
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Assignee
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| 14-1, SOTOKANDA 4-CHOME, |
| CHIYODA-KU |
| TOKYO, JAPAN 101-8980 |
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Correspondence name and address
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TASHA ALBERT
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30 SOUTH 17TH STREET
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SUITE 1800
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PHILADELPHIA, PA 19103
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