Patent Assignment Details
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Reel/Frame: | 041447/0515 | |
| Pages: | 8 |
| | Recorded: | 03/02/2017 | | |
Attorney Dkt #: | HITACHI13-0001156US01 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/12/2018
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Application #:
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15448519
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Filing Dt:
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03/02/2017
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Publication #:
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Pub Dt:
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09/14/2017
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Assignee
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15-12, NISHI-SHIMBASHI 2-CHOME |
MINATO-KU |
TOKYO, JAPAN 105-8039 |
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Correspondence name and address
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VOLPE AND KOENIG, P.C.
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UNITED PLAZA
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30 SOUTH 17TH STREET, 18TH FLOOR
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PHILADELPHIA, PA 19103
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