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Reel/Frame:042284/0040   Pages: 3
Recorded: 05/08/2017
Attorney Dkt #:TTCA-606US2-ORD
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
15440268
Filing Dt:
02/23/2017
Publication #:
Pub Dt:
08/24/2017
Title:
METHOD AND SYSTEM FOR ATOMIC LAYER ETCHING
Assignor
1
Exec Dt:
02/24/2017
Assignee
1
AKASAKA BIZ TOWER
3-1 AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN 107-6325
Correspondence name and address
TOKYO ELECTRON U.S. HOLDINGS, INC.
2400 GROVE BLVD.
AUSTIN, TX 78741

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