Patent Assignment Details
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| Reel/Frame: | 042678/0468 | |
| Pages: | 2 |
| | Recorded: | 06/12/2017 | | |
| Attorney Dkt #: | 027667.00020 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/06/2018
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Application #:
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15534904
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Filing Dt:
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06/09/2017
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Publication #:
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Pub Dt:
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12/14/2017
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Title:
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METHOD OF MANUFACTURING AN EPITAXIAL WAFER COMPRISING MEASURING A LEVEL DIFFERENCE BETWEEN A FRONT SURFACE OF A SUSCEPTOR AND AN UPPER SURFACE OF A LIFT PIN AND ADJUSTING A RATIO OF THE HEAT SOURCE OUTPUT
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Assignee
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| 2-1, OHTEMACHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-0004 |
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Correspondence name and address
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ARENT FOX LLP
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1717 K STREET, NW
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WASHINGTON, DC 20006
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