Patent Assignment Details
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| Reel/Frame: | 045410/0941 | |
| Pages: | 8 |
| | Recorded: | 04/02/2018 | | |
| Attorney Dkt #: | HITACHI13-0002157US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/07/2020
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Application #:
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15926509
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Filing Dt:
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03/20/2018
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Publication #:
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Pub Dt:
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09/27/2018
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
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Assignee
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| 15-12, NISHI-SHIMBASHI 2-CHOME, |
| MINATO-KU |
| TOKYO, JAPAN 105-8039 |
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Correspondence name and address
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VOLPE AND KOENIG, P.C.
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30 S. 17TH STREET
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SUITE 1800
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PHILADELPHIA, PA 19103
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