Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 045413/0458 | |
| Pages: | 5 |
| | Recorded: | 04/02/2018 | | |
| Attorney Dkt #: | TTCA-660US4-ORD |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/01/2019
|
Application #:
|
15695966
|
Filing Dt:
|
09/05/2017
|
|
Publication #:
|
|
Pub Dt:
|
03/08/2018
| | | | |
|
Title:
|
Location-Specific Tuning of Stress to Control Bow to Control Overlay In Semiconductor Processing
|
|
|
Assignee
|
|
|
|
|
| 3-1 AKASAKA 5-CHOME |
| AKASAKA BIZ TOWER |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
|
|
Correspondence name and address
|
| |
TOKYO ELECTRON U.S. HOLDINGS, INC.
|
| |
2400 GROVE BLVD.
|
| |
AUSTIN, TX 78741
|
Search Results as of:
05/09/2024 02:57 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
