Patent Assignment Details
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| Reel/Frame: | 045925/0260 | |
| Pages: | 5 |
| | Recorded: | 05/29/2018 | | |
| Attorney Dkt #: | HITACHI13-0001797US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/21/2020
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Application #:
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15989657
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Filing Dt:
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05/25/2018
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Publication #:
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Pub Dt:
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12/06/2018
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Assignee
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| 15-12, NISHI-SHIMBASHI 2-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 105-8039 |
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Correspondence name and address
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VOLPE AND KOENIG P.C.
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30 SOUTH 17TH STREET
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SUITE 1800
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PHILADELPHIA, PA 19103
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