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Reel/Frame:046829/0628   Pages: 3
Recorded: 09/10/2018
Attorney Dkt #:020171
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/08/2009
Application #:
10073314
Filing Dt:
02/13/2002
Publication #:
Pub Dt:
12/05/2002
Title:
ALIGNMENT SENSING METHOD FOR SEMICONDUCTOR DEVICE
Assignor
1
Exec Dt:
07/27/2018
Assignees
1
1-1, SHIBAURA 1-CHOME, MINATO-KU
TOKYO, JAPAN
2
NO. 4, CREATION RD., III, SCIENCE-BASED INDUSTRIAL PARK
HSINCHU, TAIWAN 300
Correspondence name and address
WESTERMAN, HATTORI, DANIELS & ADRIAN, LLP
8500 LEESBURG PIKE
TYSONS, VA 22182

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