Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 047168/0649 | |
| Pages: | 6 |
| | Recorded: | 10/15/2018 | | |
| Attorney Dkt #: | TEA-146_US_PRI_1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/10/2023
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Application #:
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15723005
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Filing Dt:
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10/02/2017
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Publication #:
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Pub Dt:
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04/04/2019
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Title:
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ULTRA-LOCALIZED AND PLASMA UNIFORMITY CONTROL IN A PLASMA PROCESSING SYSTEM
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Assignee
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2400 GROVE BLVD.
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AUSTIN, TX 78741
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