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Patent Assignment Details
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Reel/Frame:048745/0860   Pages: 7
Recorded: 03/29/2019
Attorney Dkt #:0118/0239M
Conveyance: CORRECTIVE ASSIGNMENT TO CORRECT THE APPLICATION SERIAL NUMBER PREVIOUSLY RECORDED AT REEL: 043517 FRAME: 0989. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Total properties: 30
1
Patent #:
8035801
Issue Dt:
10/11/2011
Application #:
12295108
Filing Dt:
09/29/2008
Publication #:
US20100177294
Pub Dt:
07/15/2010
Title:
METHOD FOR IN-SITU ABERRATION MEASUREMENT OF OPTICAL IMAGING SYSTEM IN LITHOGRAPHIC TOOLS
2
Patent #:
8027028
Issue Dt:
09/27/2011
Application #:
12299077
Filing Dt:
10/30/2008
Publication #:
US20090219503
Pub Dt:
09/03/2009
Title:
PRECISE POSITIONING SYSTEM FOR DUAL STAGE SWITCHING EXPOSURE
3
Patent #:
7746571
Issue Dt:
06/29/2010
Application #:
12302824
Filing Dt:
11/28/2008
Publication #:
US20090185290
Pub Dt:
07/23/2009
Title:
LARGE-FIELD UNIT-MAGNIFICATION PROJECTION OPTICAL SYSTEM
4
Patent #:
8130365
Issue Dt:
03/06/2012
Application #:
12304189
Filing Dt:
12/10/2008
Publication #:
US20090273765
Pub Dt:
11/05/2009
Title:
IMMERSION FLOW FIELD MAINTENANCE SYSTEM FOR AN IMMERSION LITHOGRAPHY MACHINE
5
Patent #:
8134689
Issue Dt:
03/13/2012
Application #:
12444631
Filing Dt:
04/07/2009
Publication #:
US20100045961
Pub Dt:
02/25/2010
Title:
DUAL STAGE POSITIONING AND SWITCHING SYSTEM
6
Patent #:
NONE
Issue Dt:
Application #:
13976353
Filing Dt:
06/26/2013
Publication #:
US20130293859
Pub Dt:
11/07/2013
Title:
LARGE FIELD PROJECTION OBJECTIVE FOR LITHOGRAPHY
7
Patent #:
9188434
Issue Dt:
11/17/2015
Application #:
13976376
Filing Dt:
06/26/2013
Publication #:
US20130271750
Pub Dt:
10/17/2013
Title:
BACKSIDE ALIGNMENT APPARATUS AND METHOD
8
Patent #:
8970964
Issue Dt:
03/03/2015
Application #:
13991080
Filing Dt:
05/31/2013
Publication #:
US20130250434
Pub Dt:
09/26/2013
Title:
PROJECTION OBJECTIVE LENS SYSTEM
9
Patent #:
8920031
Issue Dt:
12/30/2014
Application #:
14002561
Filing Dt:
08/30/2013
Publication #:
US20140016886
Pub Dt:
01/16/2014
Title:
SPLIT TYPE AEROSTATIC BEARING
10
Patent #:
9256138
Issue Dt:
02/09/2016
Application #:
14002917
Filing Dt:
09/03/2013
Publication #:
US20130335718
Pub Dt:
12/19/2013
Title:
METHOD FOR MEASURING DISTORTION OF PROJECTION OBJECTIVE
11
Patent #:
9519231
Issue Dt:
12/13/2016
Application #:
14115284
Filing Dt:
11/21/2013
Publication #:
US20140074428
Pub Dt:
03/13/2014
Title:
METHOD FOR MEASURING AND CALIBRATING CENTROID OF COARSE STAGE OF PHOTOLITHOGRAPHY TOOL
12
Patent #:
9195146
Issue Dt:
11/24/2015
Application #:
14239515
Filing Dt:
02/18/2014
Publication #:
US20140176925
Pub Dt:
06/26/2014
Title:
INTERFERENCE EXPOSURE DEVICE AND METHOD
13
Patent #:
9455164
Issue Dt:
09/27/2016
Application #:
14385464
Filing Dt:
09/15/2014
Publication #:
US20150037984
Pub Dt:
02/05/2015
Title:
Laser Annealing Apparatus and Laser Annealing Method
14
Patent #:
9755493
Issue Dt:
09/05/2017
Application #:
14408130
Filing Dt:
12/15/2014
Publication #:
US20150137624
Pub Dt:
05/21/2015
Title:
LINEAR MOTOR AND STAGE APPARATUS
15
Patent #:
9448488
Issue Dt:
09/20/2016
Application #:
14434079
Filing Dt:
04/07/2015
Publication #:
US20150261098
Pub Dt:
09/17/2015
Title:
Off-Axis Alignment System and Alignment Method
16
Patent #:
9588444
Issue Dt:
03/07/2017
Application #:
14437775
Filing Dt:
04/22/2015
Publication #:
US20150286154
Pub Dt:
10/08/2015
Title:
Balance Mass System Shared by Workpiece Table and Mask Table, and Lithography Machine
17
Patent #:
NONE
Issue Dt:
Application #:
14655465
Filing Dt:
06/25/2015
Publication #:
US20150357217
Pub Dt:
12/10/2015
Title:
WARPED SILICON-CHIP ADSORPTION DEVICE AND ADSORPTION METHOD THEREOF
18
Patent #:
9893596
Issue Dt:
02/13/2018
Application #:
14758720
Filing Dt:
06/30/2015
Publication #:
US20150340931
Pub Dt:
11/26/2015
Title:
MAGNETIC ALIGNMENT SYSTEM AND ALIGNMENT METHOD THEREFOR
19
Patent #:
9760025
Issue Dt:
09/12/2017
Application #:
14900073
Filing Dt:
12/18/2015
Publication #:
US20160147163
Pub Dt:
05/26/2016
Title:
Reticle Shape Regulation Device and Method, and Exposure Apparatus Using Same
20
Patent #:
10170972
Issue Dt:
01/01/2019
Application #:
14910994
Filing Dt:
02/08/2016
Publication #:
US20160197544
Pub Dt:
07/07/2016
Title:
Halbach Array and Magnetic Suspension Damper Using Same
21
Patent #:
NONE
Issue Dt:
Application #:
15038992
Filing Dt:
05/24/2016
Publication #:
US20160380524
Pub Dt:
12/29/2016
Title:
FLAT VOICE COIL MOTOR
22
Patent #:
10041548
Issue Dt:
08/07/2018
Application #:
15108083
Filing Dt:
06/24/2016
Publication #:
US20160341256
Pub Dt:
11/24/2016
Title:
SILICON WAFER EDGE PROTECTION DEVICE WITH COLLISION PROTECTION FUNCTION
23
Patent #:
9983488
Issue Dt:
05/29/2018
Application #:
15108663
Filing Dt:
06/28/2016
Publication #:
US20160327873
Pub Dt:
11/10/2016
Title:
Reticle Shape Correction Apparatus and Photolithography Tool Using Same
24
Patent #:
9857702
Issue Dt:
01/02/2018
Application #:
15108886
Filing Dt:
06/29/2016
Publication #:
US20160327875
Pub Dt:
11/10/2016
Title:
FOCUSING LEVELING DEVICE
25
Patent #:
10276418
Issue Dt:
04/30/2019
Application #:
15109040
Filing Dt:
06/29/2016
Publication #:
US20160329229
Pub Dt:
11/10/2016
Title:
Silicon Wafer Pre-alignment Device and Method Therefor
26
Patent #:
9760022
Issue Dt:
09/12/2017
Application #:
15122019
Filing Dt:
08/26/2016
Publication #:
US20170017168
Pub Dt:
01/19/2017
Title:
LITHOGRAPHY MACHINE WORKPIECE TABLE AND VERTICAL POSITION INITIALIZATION METHOD THEREOF
27
Patent #:
NONE
Issue Dt:
Application #:
15323544
Filing Dt:
01/03/2017
Publication #:
US20170144251
Pub Dt:
05/25/2017
Title:
LASER ANNEALING DEVICE
28
Patent #:
NONE
Issue Dt:
Application #:
15403581
Filing Dt:
01/11/2017
Publication #:
US20180195971
Pub Dt:
07/12/2018
Title:
Apparatus and Method for 3D Surface Inspection
29
Patent #:
10197923
Issue Dt:
02/05/2019
Application #:
15515110
Filing Dt:
03/28/2017
Publication #:
US20170219935
Pub Dt:
08/03/2017
Title:
EXPOSURE DEVICE AND OUT-OF-FOCUS AND TILT ERROR COMPENSATION METHOD
30
Patent #:
10197919
Issue Dt:
02/05/2019
Application #:
15523140
Filing Dt:
04/28/2017
Publication #:
US20170322493
Pub Dt:
11/09/2017
Title:
ADJUSTING DEVICE AND ADJUSTING METHOD FOR EXPOSURE DEVICE
Assignor
1
SHANGHAI MICRO ELECTRONICS EQUPIMENT CO., LTD.
Exec Dt:
01/20/2017
Assignee
1
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
1525 ZHANGDONG ROAD, ZHANGJIANG HIGH-TECH PARK
SHANGHAI, CHINA 201203
Correspondence name and address
MUNCY, GEISSLER, OLDS & LOWE, PC
4000 LEGATO RD., SUITE 310
FAIRFAX, VA 22033

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