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Patent Assignment Details

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Reel/Frame:	048756/0699			Pages:	5
		Recorded:	04/01/2019
Attorney Dkt #:	HITACHI18-1B
Conveyance:	CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).

Total properties: 19

Patent #:	6462411	Issue Dt:	10/08/2002	Application #:	09205299	Filing Dt:	12/04/1998
Title:	SEMICONDUCTOR WAFER PROCESSING APPARATUS FOR TRANSFERRING A WAFER MOUNT

Patent #:	6190104	Issue Dt:	02/20/2001	Application #:	09326673	Filing Dt:	06/07/1999
Title:	TREATMENT OBJECT CONVEYOR APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND TREATMENT OBJECT TREATMENT METHOD

Patent #:	6485604	Issue Dt:	11/26/2002	Application #:	09391062	Filing Dt:	09/07/1999
Title:	SUBSTRATE PROCESSING APPARATUS

Patent #:	6204199	Issue Dt:	03/20/2001	Application #:	09393276	Filing Dt:	09/10/1999
Title:	METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE

Patent #:	6496749	Issue Dt:	12/17/2002	Application #:	09413467	Filing Dt:	10/06/1999
Title:	SEMICONDUCTOR PRODUCING APPARATUS AND TEMPERATURE CONTROL METHOD THEREFOR

Patent #:	6582174	Issue Dt:	06/24/2003	Application #:	09491491	Filing Dt:	01/25/2000
Title:	SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Patent #:	6251189	Issue Dt:	06/26/2001	Application #:	09502219	Filing Dt:	02/11/2000
Title:	Substrate processing apparatus and substrate processing method

Patent #:	6368049	Issue Dt:	04/09/2002	Application #:	09544463	Filing Dt:	04/07/2000
Title:	SEMICONDUCTOR MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS

Patent #:	6573178	Issue Dt:	06/03/2003	Application #:	09556160	Filing Dt:	04/21/2000
Title:	MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS

Patent #:	6486083	Issue Dt:	11/26/2002	Application #:	09675192	Filing Dt:	09/29/2000
Title:	SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS

Patent #:	6821871	Issue Dt:	11/23/2004	Application #:	09879122	Filing Dt:	06/13/2001
Publication #:	US20020016051	Pub Dt:	02/07/2002
Title:	METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE TREATMENT METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS

Patent #:	6716772	Issue Dt:	04/06/2004	Application #:	10223981	Filing Dt:	08/20/2002
Publication #:	US20020197890	Pub Dt:	12/26/2002
Title:	SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS

Patent #:	7514377	Issue Dt:	04/07/2009	Application #:	10539569	Filing Dt:	08/18/2005
Publication #:	US20060189168	Pub Dt:	08/24/2006
Title:	PLASMA GENERATOR, OZONE GENERATOR, SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Patent #:	8482426	Issue Dt:	07/09/2013	Application #:	12805889	Filing Dt:	08/23/2010
Publication #:	US20110012745	Pub Dt:	01/20/2011
Title:	SUBSTRATE PROCESSING APPARATUS

Patent #:	9396929	Issue Dt:	07/19/2016	Application #:	14021549	Filing Dt:	09/09/2013
Publication #:	US20140080318	Pub Dt:	03/20/2014
Title:	METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM

Patent #:	9548198	Issue Dt:	01/17/2017	Application #:	14218484	Filing Dt:	03/18/2014
Publication #:	US20140287596	Pub Dt:	09/25/2014
Title:	METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

Patent #:	9343290	Issue Dt:	05/17/2016	Application #:	14219474	Filing Dt:	03/19/2014
Publication #:	US20140287598	Pub Dt:	09/25/2014
Title:	METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

Patent #:	9502239	Issue Dt:	11/22/2016	Application #:	14707350	Filing Dt:	05/08/2015
Publication #:	US20150262817	Pub Dt:	09/17/2015
Title:	SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

Patent #:	11198935	Issue Dt:	12/14/2021	Application #:	15272798	Filing Dt:	09/22/2016
Publication #:	US20170107620	Pub Dt:	04/20/2017
Title:	HEATING PART, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Assignor

Exec Dt:

10/01/2000

Assignee

3-4, KANDAKAJI-CHO

CHIYODA-KU

TOKYO, JAPAN 101-0045

Correspondence name and address
	VOLPE AND KOENIG, P.C.
	30 SOUTH 17TH STREET
	SUITE 1800
	PHILADELPHIA, PA 19103

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