Total properties:
19
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Patent #:
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Issue Dt:
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10/08/2002
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Application #:
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09205299
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Filing Dt:
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12/04/1998
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Title:
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SEMICONDUCTOR WAFER PROCESSING APPARATUS FOR TRANSFERRING A WAFER MOUNT
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Patent #:
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Issue Dt:
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02/20/2001
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Application #:
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09326673
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Filing Dt:
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06/07/1999
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Title:
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TREATMENT OBJECT CONVEYOR APPARATUS, SEMICONDUCTOR MANUFACTURING APPARATUS, AND TREATMENT OBJECT TREATMENT METHOD
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09391062
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Filing Dt:
|
09/07/1999
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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Issue Dt:
|
03/20/2001
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Application #:
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09393276
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Filing Dt:
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09/10/1999
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Title:
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METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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12/17/2002
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Application #:
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09413467
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Filing Dt:
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10/06/1999
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Title:
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SEMICONDUCTOR PRODUCING APPARATUS AND TEMPERATURE CONTROL METHOD THEREFOR
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09491491
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Filing Dt:
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01/25/2000
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Title:
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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Patent #:
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Issue Dt:
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06/26/2001
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Application #:
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09502219
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Filing Dt:
|
02/11/2000
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Title:
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Substrate processing apparatus and substrate processing method
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Patent #:
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Issue Dt:
|
04/09/2002
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Application #:
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09544463
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Filing Dt:
|
04/07/2000
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Title:
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SEMICONDUCTOR MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Patent #:
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|
Issue Dt:
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06/03/2003
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Application #:
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09556160
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Filing Dt:
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04/21/2000
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Title:
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MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Patent #:
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Issue Dt:
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11/26/2002
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Application #:
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09675192
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Filing Dt:
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09/29/2000
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Patent #:
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Issue Dt:
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11/23/2004
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Application #:
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09879122
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Filing Dt:
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06/13/2001
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Publication #:
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Pub Dt:
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02/07/2002
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Title:
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METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE TREATMENT METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Patent #:
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Issue Dt:
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04/06/2004
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Application #:
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10223981
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Filing Dt:
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08/20/2002
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Publication #:
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Pub Dt:
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12/26/2002
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Patent #:
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Issue Dt:
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04/07/2009
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Application #:
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10539569
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Filing Dt:
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08/18/2005
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Publication #:
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Pub Dt:
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08/24/2006
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Title:
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PLASMA GENERATOR, OZONE GENERATOR, SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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07/09/2013
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Application #:
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12805889
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Filing Dt:
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08/23/2010
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Publication #:
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Pub Dt:
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01/20/2011
| | | | |
Title:
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SUBSTRATE PROCESSING APPARATUS
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Patent #:
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|
Issue Dt:
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07/19/2016
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Application #:
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14021549
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Filing Dt:
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09/09/2013
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Publication #:
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Pub Dt:
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03/20/2014
| | | | |
Title:
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METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
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|
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Patent #:
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|
Issue Dt:
|
01/17/2017
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Application #:
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14218484
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Filing Dt:
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03/18/2014
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Publication #:
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|
Pub Dt:
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09/25/2014
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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Issue Dt:
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05/17/2016
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Application #:
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14219474
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Filing Dt:
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03/19/2014
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Publication #:
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Pub Dt:
|
09/25/2014
| | | | |
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Patent #:
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|
Issue Dt:
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11/22/2016
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Application #:
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14707350
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Filing Dt:
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05/08/2015
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Publication #:
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Pub Dt:
|
09/17/2015
| | | | |
Title:
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SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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12/14/2021
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Application #:
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15272798
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Filing Dt:
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09/22/2016
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Publication #:
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Pub Dt:
|
04/20/2017
| | | | |
Title:
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HEATING PART, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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