Patent Assignment Details
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Reel/Frame: | 050346/0480 | |
| Pages: | 6 |
| | Recorded: | 09/11/2019 | | |
Attorney Dkt #: | 17078-ES-TEAUS03 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/22/2022
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Application #:
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16555643
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Filing Dt:
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08/29/2019
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Publication #:
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Pub Dt:
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03/05/2020
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Title:
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APPARATUS AND PROCESS FOR ELECTRON BEAM MEDIATED PLASMA ETCH AND DEPOSITION PROCESSES
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Assignee
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AKASAKA BIZ TOWER |
3-1 AKASAKA 5-CHOME, MINATO-KU |
TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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2400 GROVE BLVD.
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AUSTIN, TX 78741
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05/13/2024 03:36 AM
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