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Reel/Frame:	052259/0227			Pages:	68
		Recorded:	03/30/2020
Attorney Dkt #:	T&A-GENERAL/Z-1830(USMA)
Conveyance:	CHANGE OF NAME AND ADDRESS

Total properties: 2251
Page 7 of 23
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Patent #:	8257569	Issue Dt:	09/04/2012	Application #:	12352238	Filing Dt:	01/12/2009
Publication #:	US20090183990	Pub Dt:	07/23/2009
Title:	CAPILLARY ARRAY UNIT AND CAPILLARY ELECTROPHORESIS APPARATUS

Patent #:	8309919	Issue Dt:	11/13/2012	Application #:	12352357	Filing Dt:	01/12/2009
Publication #:	US20090121152	Pub Dt:	05/14/2009
Title:	INSPECTION METHOD FOR SEMICONDUCTOR WAFER AND APPARATUS FOR REVIEWING DEFECTS

Patent #:	7981267	Issue Dt:	07/19/2011	Application #:	12352954	Filing Dt:	01/13/2009
Publication #:	US20090200169	Pub Dt:	08/13/2009
Title:	CAPILLARY ELECTROPHORESIS DEVICE

Patent #:	7915581	Issue Dt:	03/29/2011	Application #:	12353303	Filing Dt:	01/14/2009
Publication #:	US20090127458	Pub Dt:	05/21/2009
Title:	METHODS FOR SAMPLE PREPARATION AND OBSERVATION, CHARGED PARTICLE APPARATUS

Patent #:	7884948	Issue Dt:	02/08/2011	Application #:	12353515	Filing Dt:	01/14/2009
Publication #:	US20090185178	Pub Dt:	07/23/2009
Title:	SURFACE INSPECTION TOOL AND SURFACE INSPECTION METHOD

Patent #:	7989782	Issue Dt:	08/02/2011	Application #:	12354153	Filing Dt:	01/15/2009
Publication #:	US20090121158	Pub Dt:	05/14/2009
Title:	APPARATUS AND METHOD FOR SPECIMEN FABRICATION

Patent #:	7872232	Issue Dt:	01/18/2011	Application #:	12354174	Filing Dt:	01/15/2009
Publication #:	US20090194691	Pub Dt:	08/06/2009
Title:	ELECTRONIC MICROSCOPE APPARATUS

Patent #:	8217348	Issue Dt:	07/10/2012	Application #:	12354823	Filing Dt:	01/16/2009
Publication #:	US20090212211	Pub Dt:	08/27/2009
Title:	ELECTRON MICROSCOPE SYSTEM AND METHOD FOR EVALUATING FILM THICKNESS REDUCTION OF RESIST PATTERNS

Patent #:	7888638	Issue Dt:	02/15/2011	Application #:	12354923	Filing Dt:	01/16/2009
Publication #:	US20090242760	Pub Dt:	10/01/2009
Title:	METHOD AND APPARATUS FOR MEASURING DIMENSION OF CIRCUIT PATTERM FORMED ON SUBSTRATE BY USING SCANNING ELECTRON MICROSCOPE

Patent #:	8150645	Issue Dt:	04/03/2012	Application #:	12362818	Filing Dt:	01/30/2009
Publication #:	US20090198463	Pub Dt:	08/06/2009
Title:	AUTOMATIC ANALZYER

Patent #:	8013299	Issue Dt:	09/06/2011	Application #:	12366179	Filing Dt:	02/05/2009
Publication #:	US20090206259	Pub Dt:	08/20/2009
Title:	REVIEW METHOD AND REVIEW DEVICE

Patent #:	8077962	Issue Dt:	12/13/2011	Application #:	12366196	Filing Dt:	02/05/2009
Publication #:	US20090202139	Pub Dt:	08/13/2009
Title:	PATTERN GENERATING APPARATUS AND PATTERN SHAPE EVALUATING APPARATUS

Patent #:	7952701	Issue Dt:	05/31/2011	Application #:	12367673	Filing Dt:	02/09/2009
Publication #:	US20090213364	Pub Dt:	08/27/2009
Title:	SURFACE INSPECTION METHOD AND INSPECTING DEVICE USING THE SAME

Patent #:	8129680	Issue Dt:	03/06/2012	Application #:	12367811	Filing Dt:	02/09/2009
Publication #:	US20090212228	Pub Dt:	08/27/2009
Title:	CHARGED PARTICLE BEAM APPARATUS INCLUDING ABERRATION CORRECTOR

Patent #:	9297820	Issue Dt:	03/29/2016	Application #:	12369187	Filing Dt:	02/11/2009
Publication #:	US20090202390	Pub Dt:	08/13/2009
Title:	AUTOMATIC ANALYZER

Patent #:	8073219	Issue Dt:	12/06/2011	Application #:	12369342	Filing Dt:	02/11/2009
Publication #:	US20090245604	Pub Dt:	10/01/2009
Title:	NUCLEIC ACID ANALYZING APPARATUS

Patent #:	8139847	Issue Dt:	03/20/2012	Application #:	12370784	Filing Dt:	02/13/2009
Publication #:	US20090222753	Pub Dt:	09/03/2009
Title:	DEFECT INSPECTION TOOL AND METHOD OF PARAMETER TUNING FOR DEFECT INSPECTION TOOL

Patent #:	8110800	Issue Dt:	02/07/2012	Application #:	12370870	Filing Dt:	02/13/2009
Publication #:	US20090212212	Pub Dt:	08/27/2009
Title:	SCANNING ELECTRON MICROSCOPE SYSTEM AND METHOD FOR MEASURING DIMENSIONS OF PATTERNS FORMED ON SEMICONDUCTOR DEVICE BY USING THE SYSTEM

Patent #:	8828257	Issue Dt:	09/09/2014	Application #:	12379641	Filing Dt:	02/26/2009
Publication #:	US20100163403	Pub Dt:	07/01/2010
Title:	Plasma processing apparatus and operation method thereof

Patent #:	8547429	Issue Dt:	10/01/2013	Application #:	12379645	Filing Dt:	02/26/2009
Publication #:	US20090231424	Pub Dt:	09/17/2009
Title:	APPARATUS AND METHOD FOR MONITORING SEMICONDUCTOR DEVICE MANUFACTURING PROCESS

Patent #:	8030611	Issue Dt:	10/04/2011	Application #:	12379646	Filing Dt:	02/26/2009
Publication #:	US20090236516	Pub Dt:	09/24/2009
Title:	MASS SPECTROMETER, METHOD OF MASS SPECTROMETRY AND PROGRAM FOR MASS SPECTROMETRY

Patent #:	8282849	Issue Dt:	10/09/2012	Application #:	12385273	Filing Dt:	04/03/2009
Publication #:	US20090253222	Pub Dt:	10/08/2009
Title:	ETCHING PROCESS STATE JUDGMENT METHOD AND SYSTEM THEREFOR

Patent #:	8389935	Issue Dt:	03/05/2013	Application #:	12385612	Filing Dt:	04/14/2009
Publication #:	US20090256076	Pub Dt:	10/15/2009
Title:	CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH-RESOLUTION AND HIGH-CONTRAST OBSERVATION

Patent #:	NONE	Issue Dt:		Application #:	12388300	Filing Dt:	02/18/2009
Publication #:	US20090230291	Pub Dt:	09/17/2009
Title:	AUTOMATIC ANALYZER AND ANALYSIS SYSTEM USING PHOTOMULTIPLIER TUBE

Patent #:	8731706	Issue Dt:	05/20/2014	Application #:	12388617	Filing Dt:	02/19/2009
Publication #:	US20100068009	Pub Dt:	03/18/2010
Title:	VACUUM PROCESSING APPARATUS

Patent #:	NONE	Issue Dt:		Application #:	12388845	Filing Dt:	02/19/2009
Publication #:	US20090222213	Pub Dt:	09/03/2009
Title:	AUTOMATIC ANALYZER

Patent #:	8115169	Issue Dt:	02/14/2012	Application #:	12388968	Filing Dt:	02/19/2009
Publication #:	US20090152463	Pub Dt:	06/18/2009
Title:	METHOD AND APPARATUS OF PATTERN INSPECTION AND SEMICONDUCTOR INSPECTION SYSTEM USING THE SAME

Patent #:	8295584	Issue Dt:	10/23/2012	Application #:	12389885	Filing Dt:	02/20/2009
Publication #:	US20090238443	Pub Dt:	09/24/2009
Title:	PATTERN MEASUREMENT METHODS AND PATTERN MEASUREMENT EQUIPMENT

Patent #:	8416292	Issue Dt:	04/09/2013	Application #:	12389962	Filing Dt:	02/20/2009
Publication #:	US20090213215	Pub Dt:	08/27/2009
Title:	DEFECT INSPECTION APPARATUS AND METHOD

Patent #:	8142567	Issue Dt:	03/27/2012	Application #:	12392127	Filing Dt:	02/25/2009
Publication #:	US20100192857	Pub Dt:	08/05/2010
Title:	VACUUM PROCESSING APPARATUS

Patent #:	8311314	Issue Dt:	11/13/2012	Application #:	12392533	Filing Dt:	02/25/2009
Publication #:	US20090232385	Pub Dt:	09/17/2009
Title:	PATTERN MEASURING METHOD AND PATTERN MEASURING DEVICE

Patent #:	8080790	Issue Dt:	12/20/2011	Application #:	12392563	Filing Dt:	02/25/2009
Publication #:	US20090224170	Pub Dt:	09/10/2009
Title:	SCANNING ELECTRON MICROSCOPE

Patent #:	8953855	Issue Dt:	02/10/2015	Application #:	12393321	Filing Dt:	02/26/2009
Publication #:	US20090226096	Pub Dt:	09/10/2009
Title:	EDGE DETECTION TECHNIQUE AND CHARGED PARTICLE RADIATION EQUIPMENT

Patent #:	8121395	Issue Dt:	02/21/2012	Application #:	12393827	Filing Dt:	02/26/2009
Publication #:	US20090226075	Pub Dt:	09/10/2009
Title:	INSPECTION APPARATUS AND AN INSPECTION METHOD FOR INSPECTING A CIRCUIT PATTERN

Patent #:	8278917	Issue Dt:	10/02/2012	Application #:	12394041	Filing Dt:	02/27/2009
Publication #:	US20100061002	Pub Dt:	03/11/2010
Title:	MAGNETIC HEAD INSPECTION METHOD AND MAGNETIC HEAD INSPECTION DEVICE

Patent #:	8114244	Issue Dt:	02/14/2012	Application #:	12396673	Filing Dt:	03/03/2009
Publication #:	US20100159704	Pub Dt:	06/24/2010
Title:	METHOD FOR ETCHING A SAMPLE

Patent #:	8197704	Issue Dt:	06/12/2012	Application #:	12397447	Filing Dt:	03/04/2009
Publication #:	US20100206845	Pub Dt:	08/19/2010
Title:	PLASMA PROCESSING APPARATUS AND METHOD FOR OPERATING THE SAME

Patent #:	8397668	Issue Dt:	03/19/2013	Application #:	12398226	Filing Dt:	03/05/2009
Publication #:	US20090194235	Pub Dt:	08/06/2009
Title:	PLASMA PROCESSING APPARATUS

Patent #:	8294122	Issue Dt:	10/23/2012	Application #:	12400321	Filing Dt:	03/09/2009
Publication #:	US20090242804	Pub Dt:	10/01/2009
Title:	METHOD FOR FLUORESCENCE ANALYSIS AND FLUORESCENCE ANALYZER

Patent #:	8285056	Issue Dt:	10/09/2012	Application #:	12401848	Filing Dt:	03/11/2009
Publication #:	US20090232405	Pub Dt:	09/17/2009
Title:	METHOD AND APPARATUS FOR COMPUTING DEGREE OF MATCHING

Patent #:	8477302	Issue Dt:	07/02/2013	Application #:	12412776	Filing Dt:	03/27/2009
Publication #:	US20090279081	Pub Dt:	11/12/2009
Title:	DEFECT INSPECTION APPARATUS

Patent #:	8300919	Issue Dt:	10/30/2012	Application #:	12413631	Filing Dt:	03/30/2009
Publication #:	US20090263024	Pub Dt:	10/22/2009
Title:	APPARATUS FOR DATA ANALYSIS

Patent #:	8237119	Issue Dt:	08/07/2012	Application #:	12414759	Filing Dt:	03/31/2009
Publication #:	US20090266985	Pub Dt:	10/29/2009
Title:	SCANNING TYPE CHARGED PARTICLE BEAM MICROSCOPE AND AN IMAGE PROCESSING METHOD USING THE SAME

Patent #:	8263936	Issue Dt:	09/11/2012	Application #:	12414883	Filing Dt:	03/31/2009
Publication #:	US20090242766	Pub Dt:	10/01/2009
Title:	TRANSMISSION ELECTRON MICROSCOPE HAVING ELECTRON SPECTROSCOPE

Patent #:	7989766	Issue Dt:	08/02/2011	Application #:	12416914	Filing Dt:	04/01/2009
Publication #:	US20090250610	Pub Dt:	10/08/2009
Title:	SAMPLE INSPECTION APPARATUS

Patent #:	7881558	Issue Dt:	02/01/2011	Application #:	12420263	Filing Dt:	04/08/2009
Publication #:	US20090202166	Pub Dt:	08/13/2009
Title:	SCANNING MICROSCOPE

Patent #:	8121398	Issue Dt:	02/21/2012	Application #:	12420932	Filing Dt:	04/09/2009
Publication #:	US20090257647	Pub Dt:	10/15/2009
Title:	METHOD AND APPARATUS FOR INSPECTING DEFECTS

Patent #:	8203706	Issue Dt:	06/19/2012	Application #:	12423902	Filing Dt:	04/15/2009
Publication #:	US20090279079	Pub Dt:	11/12/2009
Title:	METHOD AND APPARATUS FOR INSPECTING DEFECTS

Patent #:	8355559	Issue Dt:	01/15/2013	Application #:	12428557	Filing Dt:	04/23/2009
Publication #:	US20090268959	Pub Dt:	10/29/2009
Title:	METHOD AND APPARATUS FOR REVIEWING DEFECTS

Patent #:	7885789	Issue Dt:	02/08/2011	Application #:	12430701	Filing Dt:	04/27/2009
Publication #:	US20090281755	Pub Dt:	11/12/2009
Title:	RECIPE PARAMETER MANAGEMENT SYSTEM AND RECIPE PARAMETER MANAGEMENT METHOD

Patent #:	7909933	Issue Dt:	03/22/2011	Application #:	12437941	Filing Dt:	05/08/2009
Publication #:	US20090214401	Pub Dt:	08/27/2009
Title:	PLASMA PROCESSING METHOD

Patent #:	8686380	Issue Dt:	04/01/2014	Application #:	12453986	Filing Dt:	05/28/2009
Publication #:	US20090294697	Pub Dt:	12/03/2009
Title:	Charged particle beam apparatus

Patent #:	8502141	Issue Dt:	08/06/2013	Application #:	12457734	Filing Dt:	06/19/2009
Publication #:	US20090261252	Pub Dt:	10/22/2009
Title:	GRAPHICAL USER INTERFACE FOR USE WITH ELECTRON BEAM WAFER INSPECTION

Patent #:	8080786	Issue Dt:	12/20/2011	Application #:	12461292	Filing Dt:	08/06/2009
Publication #:	US20090294646	Pub Dt:	12/03/2009
Title:	MASS SPECTROMETER

Patent #:	8041443	Issue Dt:	10/18/2011	Application #:	12469762	Filing Dt:	05/21/2009
Publication #:	US20090292387	Pub Dt:	11/26/2009
Title:	SURFACE DEFECT DATA DISPLAY AND MANAGEMENT SYSTEM AND A METHOD OF DISPLAYING AND MANAGING A SURFACE DEFECT DATA

Patent #:	8205485	Issue Dt:	06/26/2012	Application #:	12470164	Filing Dt:	05/21/2009
Publication #:	US20090288473	Pub Dt:	11/26/2009
Title:	WAY OF METHOD TRANSFER OF LIQUID CHROMATOGRAPH AND LIQUID CHROMATOGRAPH SYSTEM

Patent #:	8144337	Issue Dt:	03/27/2012	Application #:	12470505	Filing Dt:	05/22/2009
Publication #:	US20090290168	Pub Dt:	11/26/2009
Title:	INSPECTING METHOD AND INSPECTING APPARATUS FOR SUBSTRATE SURFACE

Patent #:	8074293	Issue Dt:	12/06/2011	Application #:	12471907	Filing Dt:	05/26/2009
Publication #:	US20090230984	Pub Dt:	09/17/2009
Title:	DEFECTIVE PRODUCT INSPECTION APPARATUS, PROBE POSITIONING METHOD AND PROBE MOVING METHOD

Patent #:	7982182	Issue Dt:	07/19/2011	Application #:	12472899	Filing Dt:	05/27/2009
Publication #:	US20090294661	Pub Dt:	12/03/2009
Title:	MASS SPECTROMETER AND MASS SPECTROMETRY METHOD

Patent #:	7999222	Issue Dt:	08/16/2011	Application #:	12474992	Filing Dt:	05/29/2009
Publication #:	US20090294659	Pub Dt:	12/03/2009
Title:	TIME-OF-FLIGHT MASS SPECTROMETER

Patent #:	9028770	Issue Dt:	05/12/2015	Application #:	12478151	Filing Dt:	06/04/2009
Publication #:	US20090306300	Pub Dt:	12/10/2009
Title:	Cell Made of Polymers for Spectra Measurement and Method for Producing the Same

Patent #:	7773210	Issue Dt:	08/10/2010	Application #:	12482479	Filing Dt:	06/11/2009
Publication #:	US20090244529	Pub Dt:	10/01/2009
Title:	APPEARANCE INSPECTION APPARATUS

Patent #:	8143573	Issue Dt:	03/27/2012	Application #:	12490775	Filing Dt:	06/24/2009
Publication #:	US20090322973	Pub Dt:	12/31/2009
Title:	CHARGED PARTICLE BEAM APPARATUS

Patent #:	7989330	Issue Dt:	08/02/2011	Application #:	12512103	Filing Dt:	07/30/2009
Publication #:	US20100285669	Pub Dt:	11/11/2010
Title:	DRY ETCHING METHOD

Patent #:	8436899	Issue Dt:	05/07/2013	Application #:	12535021	Filing Dt:	08/04/2009
Publication #:	US20100033560	Pub Dt:	02/11/2010
Title:	METHOD AND APPARATUS OF TILTED ILLUMINATION OBSERVATION

Patent #:	8833089	Issue Dt:	09/16/2014	Application #:	12538986	Filing Dt:	08/11/2009
Publication #:	US20100326094	Pub Dt:	12/30/2010
Title:	PLASMA PROCESSING APPARATUS AND MAINTENANCE METHOD THEREFOR

Patent #:	7830502	Issue Dt:	11/09/2010	Application #:	12540825	Filing Dt:	08/13/2009
Publication #:	US20100060889	Pub Dt:	03/11/2010
Title:	SUBSTRATE INSPECTION DEVICE AND SUBSTRATE INSPECTION METHOD

Patent #:	8030614	Issue Dt:	10/04/2011	Application #:	12549828	Filing Dt:	08/28/2009
Publication #:	US20090314938	Pub Dt:	12/24/2009
Title:	CHARGED PARTICLE BEAM APPARATUS AND DIMENSION MEASURING METHOD

Patent #:	8405026	Issue Dt:	03/26/2013	Application #:	12554275	Filing Dt:	09/04/2009
Publication #:	US20100059676	Pub Dt:	03/11/2010
Title:	CHARGED PARTICLE BEAM APPARATUS

Patent #:	8592776	Issue Dt:	11/26/2013	Application #:	12554577	Filing Dt:	09/04/2009
Publication #:	US20100065753	Pub Dt:	03/18/2010
Title:	CHARGED PARTICLE BEAM APPARATUS

Patent #:	8094295	Issue Dt:	01/10/2012	Application #:	12555610	Filing Dt:	09/08/2009
Publication #:	US20100002227	Pub Dt:	01/07/2010
Title:	INSPECTION METHOD AND INSPECTION APPARATUS

Patent #:	7973922	Issue Dt:	07/05/2011	Application #:	12556144	Filing Dt:	09/09/2009
Publication #:	US20090323051	Pub Dt:	12/31/2009
Title:	OPTICAL INSPECTION METHOD AND OPTICAL INSPECTION APPARATUS

Patent #:	7925367	Issue Dt:	04/12/2011	Application #:	12573463	Filing Dt:	10/05/2009
Publication #:	US20100021047	Pub Dt:	01/28/2010
Title:	DEFECT REVIEW AND CLASSIFICATION SYSTEM

Patent #:	8093557	Issue Dt:	01/10/2012	Application #:	12573479	Filing Dt:	10/05/2009
Publication #:	US20100019150	Pub Dt:	01/28/2010
Title:	METHOD AND APPARATUS FOR REVIEWING DEFECTS

Patent #:	8795467	Issue Dt:	08/05/2014	Application #:	12575514	Filing Dt:	10/08/2009
Publication #:	US20100018649	Pub Dt:	01/28/2010
Title:	PLASMA PROCESSING APPARATUS AND METHOD

Patent #:	RE45204	Issue Dt:	10/21/2014	Application #:	12614358	Filing Dt:	11/06/2009
Title:	METHOD AND APPARATUS FOR CREATING IMAGING RECIPE

Patent #:	7888111	Issue Dt:	02/15/2011	Application #:	12614471	Filing Dt:	11/09/2009
Publication #:	US20100055779	Pub Dt:	03/04/2010
Title:	CELL CULTURE VESSEL, PRODUCTION PROCESS THEREOF AND CULTURED CELL

Patent #:	8207513	Issue Dt:	06/26/2012	Application #:	12615955	Filing Dt:	11/10/2009
Publication #:	US20100051806	Pub Dt:	03/04/2010
Title:	CHARGED PARTICLE BEAM APPARATUS

Patent #:	RE45224	Issue Dt:	10/28/2014	Application #:	12621307	Filing Dt:	11/18/2009
Title:	METHOD AND APPARATUS FOR CREATING IMAGING RECIPE

Patent #:	8008622	Issue Dt:	08/30/2011	Application #:	12630346	Filing Dt:	12/03/2009
Publication #:	US20100078555	Pub Dt:	04/01/2010
Title:	ELECTRON BEAM APPARATUS AND METHOD OF GENERATING AN ELECTRON BEAM IRRADIATION PATTERN

Patent #:	8249817	Issue Dt:	08/21/2012	Application #:	12633569	Filing Dt:	12/08/2009
Publication #:	US20100082263	Pub Dt:	04/01/2010
Title:	CHROMATOGRAPH ANALYZING DEVICE

Patent #:	8148682	Issue Dt:	04/03/2012	Application #:	12648766	Filing Dt:	12/29/2009
Publication #:	US20110155904	Pub Dt:	06/30/2011
Title:	METHOD AND APPARATUS FOR PATTERN POSITION AND OVERLAY MEASUREMENT

Patent #:	8263935	Issue Dt:	09/11/2012	Application #:	12651209	Filing Dt:	12/31/2009
Publication #:	US20100102224	Pub Dt:	04/29/2010
Title:	CHARGED PARTICLE BEAM APPARATUS

Patent #:	8286822	Issue Dt:	10/16/2012	Application #:	12651701	Filing Dt:	01/04/2010
Publication #:	US20100171061	Pub Dt:	07/08/2010
Title:	VACUUM PROCESSING APPARATUS

Patent #:	7953567	Issue Dt:	05/31/2011	Application #:	12683455	Filing Dt:	01/07/2010
Publication #:	US20100106443	Pub Dt:	04/29/2010
Title:	DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD

Patent #:	8178840	Issue Dt:	05/15/2012	Application #:	12691331	Filing Dt:	01/21/2010
Publication #:	US20100116986	Pub Dt:	05/13/2010
Title:	SPECIMEN INSPECTION EQUIPMENT AND HOW TO MAKE THE ELECTRON BEAM ABSORBED CURRENT IMAGES

Patent #:	8890706	Issue Dt:	11/18/2014	Application #:	12693687	Filing Dt:	01/26/2010
Publication #:	US20100188244	Pub Dt:	07/29/2010
Title:	Orientation Identification Label, Reagent Container Carrier Structure, Analyzer Device And Reader Module

Patent #:	9039865	Issue Dt:	05/26/2015	Application #:	12694363	Filing Dt:	01/27/2010
Publication #:	US20110108194	Pub Dt:	05/12/2011
Title:	PLASMA PROCESSING APPARATUS

Patent #:	8090190	Issue Dt:	01/03/2012	Application #:	12695090	Filing Dt:	01/27/2010
Publication #:	US20100128970	Pub Dt:	05/27/2010
Title:	METHOD AND APPARATUS FOR REVIEWING DEFECTS

Patent #:	8349127	Issue Dt:	01/08/2013	Application #:	12696552	Filing Dt:	01/29/2010
Publication #:	US20110132541	Pub Dt:	06/09/2011
Title:	VACUUM PROCESSING APPARATUS AND PLASMA PROCESSING APPARATUS WITH TEMPERATURE CONTROL FUNCTION FOR WAFER STAGE

Patent #:	8992721	Issue Dt:	03/31/2015	Application #:	12696571	Filing Dt:	01/29/2010
Publication #:	US20110083808	Pub Dt:	04/14/2011
Title:	PLASMA PROCESSING APPARATUS

Patent #:	8425786	Issue Dt:	04/23/2013	Application #:	12700903	Filing Dt:	02/05/2010
Publication #:	US20110100954	Pub Dt:	05/05/2011
Title:	PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS

Patent #:	8173962	Issue Dt:	05/08/2012	Application #:	12708148	Filing Dt:	02/18/2010
Publication #:	US20100140472	Pub Dt:	06/10/2010
Title:	PATTERN DISPLACEMENT MEASURING METHOD AND PATTERN MEASURING DEVICE

Patent #:	8366370	Issue Dt:	02/05/2013	Application #:	12712834	Filing Dt:	02/25/2010
Publication #:	US20110176893	Pub Dt:	07/21/2011
Title:	VACUUM PROCESSING APPARATUS

Patent #:	7916288	Issue Dt:	03/29/2011	Application #:	12713500	Filing Dt:	02/26/2010
Publication #:	US20100149528	Pub Dt:	06/17/2010
Title:	DEFECT INSPECTION METHOD

Patent #:	8304723	Issue Dt:	11/06/2012	Application #:	12725857	Filing Dt:	03/17/2010
Publication #:	US20100187416	Pub Dt:	07/29/2010
Title:	DEFECT INSPECTION AND CHARGED PARTICLE BEAM APPARATUS

Patent #:	8178837	Issue Dt:	05/15/2012	Application #:	12728562	Filing Dt:	03/22/2010
Publication #:	US20100177954	Pub Dt:	07/15/2010
Title:	LOGICAL CAD NAVIGATION FOR DEVICE CHARACTERISTICS EVALUATION SYSTEM

Patent #:	9194876	Issue Dt:	11/24/2015	Application #:	12729787	Filing Dt:	03/23/2010
Publication #:	US20100250174	Pub Dt:	09/30/2010
Title:	SAMPLE INSPECTION SYSTEM AND OPERATING METHOD FOR MANAGEMENT SERVER THEREOF

Patent #:	8431891	Issue Dt:	04/30/2013	Application #:	12731910	Filing Dt:	03/25/2010
Publication #:	US20100176297	Pub Dt:	07/15/2010
Title:	Dual beam apparatus with tilting sample stage

100

Patent #:	7916287	Issue Dt:	03/29/2011	Application #:	12754634	Filing Dt:	04/06/2010
Publication #:	US20100188656	Pub Dt:	07/29/2010
Title:	SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS

Assignor

HITACHI HIGH-TECHNOLOGIES CORPORATION

Exec Dt:

02/12/2020

Assignee

HITACHI HIGH-TECH CORPORATION

17-1, TORANOMON 1-CHOME, MINATO-KU

TOKYO, JAPAN

Correspondence name and address
	MATTINGLY & MALUR PC
	1800 DIAGONAL ROAD
	SUITE 210
	ALEXANDRIA, VA 22314

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