Patent Assignment Details
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| Reel/Frame: | 055912/0344 | |
| Pages: | 5 |
| | Recorded: | 04/14/2021 | | |
| Attorney Dkt #: | 35620UA |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/26/2024
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Application #:
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17229122
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Filing Dt:
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04/13/2021
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Publication #:
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Pub Dt:
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07/29/2021
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Title:
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Microwave Plasma Source, Microwave Plasma Processing Apparatus and Plasma Processing Method
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Assignee
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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NATH, GOLDBERG & MEYER
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112 S WEST STREET
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35620UA_JLM_HJ
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ALEXANDRIA, VA 22314
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