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Total properties:
35
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Patent #:
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Issue Dt:
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12/08/2009
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Application #:
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11276426
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Filing Dt:
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02/28/2006
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Publication #:
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Pub Dt:
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03/29/2007
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Title:
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DIE-TO-DIE PHOTOMASK DEFECT DETECTION USING REGION DATA TO MODIFY INSPECTION THRESHOLDS
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Patent #:
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Issue Dt:
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05/26/2009
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Application #:
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11278637
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Filing Dt:
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04/04/2006
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Publication #:
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Pub Dt:
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03/29/2007
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Title:
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METHOD OF OPERATING LASER LIGHT SOURCE
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Patent #:
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Issue Dt:
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02/16/2010
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Application #:
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11283755
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Filing Dt:
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11/22/2005
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Publication #:
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Pub Dt:
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03/01/2007
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Title:
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PHOTOMASK INSPECTION APPARATUS COMPARING OPTICAL PROXIMITY CORRECTION PATTERNS TO MINIMUM AND MAXIMUM LIMITS
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Patent #:
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Issue Dt:
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12/29/2009
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Application #:
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11284186
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Filing Dt:
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11/22/2005
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Publication #:
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Pub Dt:
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03/01/2007
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Title:
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DIE-TO-DATABASE PHOTOMASK DEFECT DETECTION USING REGION DATA TO MODIFY INSPECTION THRESHOLDS
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Patent #:
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Issue Dt:
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08/18/2009
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Application #:
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11287419
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Filing Dt:
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11/28/2005
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Publication #:
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Pub Dt:
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03/08/2007
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Title:
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SAMPLE INSPECTION APPARATUS, IMAGE ALIGNMENT METHOD, AND PROGRAM-RECORDED READABLE RECORDING MEDIUM
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Patent #:
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Issue Dt:
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01/05/2010
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Application #:
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11299847
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Filing Dt:
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12/13/2005
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Publication #:
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Pub Dt:
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03/29/2007
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Title:
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WORKPIECE INSPECTION APPARATUS, WORKPIECE INSPECTION METHOD AND COMPUTER-READABLE RECORDING MEDIUM STORING PROGRAM
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Patent #:
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Issue Dt:
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02/24/2009
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Application #:
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11299848
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Filing Dt:
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12/13/2005
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Publication #:
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Pub Dt:
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03/22/2007
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Title:
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PATTERN INSPECTION APPARATUS
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Patent #:
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Issue Dt:
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06/17/2008
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Application #:
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11344205
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Filing Dt:
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02/01/2006
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Publication #:
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Pub Dt:
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04/12/2007
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Title:
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LIGHT AMOUNT MEASUREMENT DEVICE AND LIGHT AMOUNT MEASUREMENT METHOD
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Patent #:
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Issue Dt:
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02/03/2009
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Application #:
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11360580
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Filing Dt:
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02/24/2006
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Publication #:
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Pub Dt:
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03/22/2007
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Title:
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PATTERN INSPECTION SYSTEM USING IMAGE CORRECTION SCHEME WITH OBJECT-SENSITIVE AUTOMATIC MODE SWITCHABILITY
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11360581
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Filing Dt:
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02/24/2006
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Publication #:
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Pub Dt:
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09/28/2006
| | | | |
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Title:
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IMAGE CORRECTING METHOD
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Patent #:
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Issue Dt:
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05/26/2009
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Application #:
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11360584
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Filing Dt:
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02/24/2006
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Publication #:
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Pub Dt:
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09/28/2006
| | | | |
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Title:
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IMAGE CORRECTION METHOD
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Patent #:
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Issue Dt:
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12/01/2009
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Application #:
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11360657
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Filing Dt:
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02/24/2006
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Publication #:
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Pub Dt:
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03/22/2007
| | | | |
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Title:
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PATTERN INSPECTION METHOD AND APPARATUS WITH HIGH-ACCURACY PATTERN IMAGE CORRECTION CAPABILITY
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Patent #:
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Issue Dt:
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07/21/2009
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Application #:
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11360679
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Filing Dt:
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02/24/2006
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Publication #:
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Pub Dt:
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03/22/2007
| | | | |
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Title:
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IMAGE DENSITY-ADAPTED AUTOMATIC MODE SWITCHABLE PATTERN CORRECTION SCHEME FOR WORKPIECE INSPECTION
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Patent #:
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Issue Dt:
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12/01/2009
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Application #:
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11360813
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Filing Dt:
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02/24/2006
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Publication #:
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Pub Dt:
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03/22/2007
| | | | |
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Title:
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PATTERN INSPECTION METHOD AND APPARATUS USING LINEAR PREDICTIVE MODEL-BASED IMAGE CORRECTION TECHNIQUE
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Patent #:
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Issue Dt:
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07/13/2010
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Application #:
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11560039
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Filing Dt:
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11/15/2006
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Publication #:
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Pub Dt:
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12/20/2007
| | | | |
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Title:
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PATTERN INSPECTION APPARATUS AND METHOD WITH LOCAL CRITICAL DIMENSION ERROR DETECTABILITY
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Patent #:
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Issue Dt:
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07/27/2010
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Application #:
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11567520
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Filing Dt:
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12/06/2006
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Publication #:
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Pub Dt:
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02/28/2008
| | | | |
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Title:
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PATTERN INSPECTION APPARATUS AND METHOD WITH ENHANCED TEST IMAGE CORRECTABILITY USING FREQUENCY DIVISION SCHEME
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Patent #:
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Issue Dt:
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09/14/2010
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Application #:
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11567550
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Filing Dt:
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12/06/2006
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Publication #:
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Pub Dt:
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02/28/2008
| | | | |
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Title:
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IMAGE CORRECTION METHOD AND APPARATUS FOR USE IN PATTERN INSPECTION SYSTEM
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|
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Patent #:
|
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Issue Dt:
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02/02/2010
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Application #:
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11678748
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Filing Dt:
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02/26/2007
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Publication #:
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Pub Dt:
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02/14/2008
| | | | |
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Title:
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TARGET WORKPIECE INSPECTION APPARATUS, IMAGE ALIGNMENT METHOD, AND COMPUTER-READABLE RECORDING MEDIUM WITH PROGRAM RECORDED THEREON
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Patent #:
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Issue Dt:
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10/05/2010
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Application #:
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11692352
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Filing Dt:
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03/28/2007
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Publication #:
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Pub Dt:
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02/14/2008
| | | | |
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Title:
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PATTERN INSPECTION APPARATUS, IMAGE ALIGNMENT METHOD, DISPLACEMENT AMOUNT ESTIMATION METHOD, AND COMPUTER-READABLE RECORDING MEDIUM WITH PROGRAM RECORDED THEREON
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Patent #:
|
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Issue Dt:
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02/02/2010
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Application #:
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11781727
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Filing Dt:
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07/23/2007
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Publication #:
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Pub Dt:
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01/17/2008
| | | | |
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Title:
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PATTERN INSPECTION APPARATUS
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|
|
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Patent #:
|
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Issue Dt:
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07/31/2012
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Application #:
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11971550
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Filing Dt:
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01/09/2008
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Publication #:
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Pub Dt:
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10/23/2008
| | | | |
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Title:
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PATTERN INSPECTION APPARATUS, CORRECTED IMAGE GENERATION METHOD, AND COMPUTER-READABLE RECORDING MEDIUM STORING PROGRAM
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|
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Patent #:
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Issue Dt:
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02/24/2009
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Application #:
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12031223
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Filing Dt:
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02/14/2008
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Publication #:
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Pub Dt:
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09/25/2008
| | | | |
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Title:
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LEVEL DETECTION APPARATUS
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|
|
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Patent #:
|
|
Issue Dt:
|
01/04/2011
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Application #:
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12047759
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Filing Dt:
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03/13/2008
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Publication #:
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Pub Dt:
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10/02/2008
| | | | |
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Title:
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LIGHTING OPTICAL APPARATUS AND SAMPLE INSPECTION APPARATUS
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Patent #:
|
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Issue Dt:
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11/01/2011
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Application #:
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12047844
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Filing Dt:
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03/13/2008
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Publication #:
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Pub Dt:
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10/23/2008
| | | | |
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Title:
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RETICLE DEFECT INSPECTION APPARATUS AND INSPECTION METHOD USING THEREOF
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Patent #:
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Issue Dt:
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02/22/2011
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Application #:
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12061118
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Filing Dt:
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04/02/2008
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Publication #:
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Pub Dt:
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10/23/2008
| | | | |
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Title:
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RETICLE DEFECT INSPECTION APPARATUS AND RETICLE DEFECT INSPECTION METHOD
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Patent #:
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Issue Dt:
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08/24/2010
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Application #:
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12187770
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Filing Dt:
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08/07/2008
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Publication #:
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Pub Dt:
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04/02/2009
| | | | |
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Title:
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BEAM IRRADIATION APPARATUS WITH DEEP ULTRAVIOLET LIGHT EMISSION DEVICE FOR LITHOGRAPHIC PATTERN INSPECTION SYSTEM
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Patent #:
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Issue Dt:
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05/03/2011
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Application #:
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12209380
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Filing Dt:
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09/12/2008
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Publication #:
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Pub Dt:
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03/19/2009
| | | | |
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Title:
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MASK BLANK FOR EUV EXPOSURE AND MASK FOR EUV EXPOSURE
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|
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Patent #:
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Issue Dt:
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09/04/2012
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Application #:
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12347345
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Filing Dt:
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12/31/2008
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Publication #:
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Pub Dt:
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09/24/2009
| | | | |
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Title:
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PATTERN INSPECTION APPARATUS, PATTERN INSPECTION METHOD, AND COMPUTER-READABLE RECORDING MEDIUM STORING A PROGRAM
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|
|
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Patent #:
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Issue Dt:
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09/13/2011
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Application #:
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12390619
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Filing Dt:
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02/23/2009
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Publication #:
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Pub Dt:
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08/27/2009
| | | | |
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Title:
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PATTERN IMAGE CORRECTING APPARATUS, PATTERN INSPECTION APPARATUS, AND PATTERN IMAGE CORRECTING METHOD
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|
|
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Patent #:
|
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Issue Dt:
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01/10/2012
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Application #:
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12392545
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Filing Dt:
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02/25/2009
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Publication #:
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Pub Dt:
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12/10/2009
| | | | |
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Title:
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ULTRAFINE PATTERN DISCRIMINATION USING TRANSMITTED/REFLECTED WORKPIECE IMAGES FOR USE IN LITHOGRAPHY INSPECTION SYSTEM
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|
|
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Patent #:
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Issue Dt:
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08/28/2012
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Application #:
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12395840
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Filing Dt:
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03/02/2009
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Publication #:
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Pub Dt:
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09/24/2009
| | | | |
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Title:
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ULTRAFINE LITHOGRAPHY PATTERN INSPECTION USING MULTI-STAGE TDI IMAGE SENSORS WITH FALSE IMAGE REMOVABILITY
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Patent #:
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Issue Dt:
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06/12/2012
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Application #:
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12404569
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Filing Dt:
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03/16/2009
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Publication #:
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Pub Dt:
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09/24/2009
| | | | |
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Title:
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LIGHT POLARIZATION CONTROL USING SERIAL COMBINATION OF SURFACE-SEGMENTED HALF WAVELENGTH PLATES
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|
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Patent #:
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Issue Dt:
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08/31/2010
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Application #:
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12482836
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Filing Dt:
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06/11/2009
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Publication #:
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Pub Dt:
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10/01/2009
| | | | |
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Title:
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IMAGE DENSITY-ADAPTED AUTOMATIC MODE SWITCHABLE PATTERN CORRECTION SCHEME FOR WORKPIECE INSPECTION
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|
|
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Patent #:
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Issue Dt:
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07/24/2012
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Application #:
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12546963
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Filing Dt:
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08/25/2009
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Publication #:
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Pub Dt:
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03/25/2010
| | | | |
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Title:
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PHOTOMASK INSPECTION METHOD
|
|
|
|
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Patent #:
|
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Issue Dt:
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05/14/2013
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Application #:
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12815731
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Filing Dt:
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06/15/2010
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Publication #:
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Pub Dt:
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09/22/2011
| | | | |
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Title:
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PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
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