Patent Assignment Details
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| Reel/Frame: | 057520/0486 | |
| Pages: | 13 |
| | Recorded: | 09/17/2021 | | |
| Attorney Dkt #: | HITACHI13-0002988US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17477296
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Filing Dt:
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09/16/2021
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Publication #:
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Pub Dt:
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01/06/2022
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
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Assignee
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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Correspondence name and address
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WESLEY T. MCMICHAEL, VOLPE KOENIG
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30 SOUTH 17TH STREET, 18TH FLOOR
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PHILADELPHIA, PA 19103
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