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Reel/Frame:	058573/0535			Pages:	7
		Recorded:	12/23/2021
Attorney Dkt #:	01213GEN
Conveyance:	CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).

Total properties: 20

Patent #:	7066787	Issue Dt:	06/27/2006	Application #:	10765147	Filing Dt:	01/28/2004
Publication #:	US20040185751	Pub Dt:	09/23/2004
Title:	SUBSTRATE PROCESSING APPARATUS

Patent #:	7212017	Issue Dt:	05/01/2007	Application #:	11019111	Filing Dt:	12/22/2004
Publication #:	US20050199807	Pub Dt:	09/15/2005
Title:	ELECTRON BEAM APPARATUS WITH DETAILED OBSERVATION FUNCTION AND SAMPLE INSPECTING AND OBSERVING METHOD USING ELECTRON BEAM APPARATUS

Patent #:	7098457	Issue Dt:	08/29/2006	Application #:	11134330	Filing Dt:	05/23/2005
Publication #:	US20050205783	Pub Dt:	09/22/2005
Title:	ELECTRON BEAM APPARATUS AND DEVICE MANUFACTURING METHOD USING SAME

Patent #:	7352195	Issue Dt:	04/01/2008	Application #:	11723591	Filing Dt:	03/21/2007
Publication #:	US20070200569	Pub Dt:	08/30/2007
Title:	ELECTRON BEAM APPARATUS WITH DETAILED OBSERVATION FUNCTION AND SAMPLE INSPECTING AND OBSERVING METHOD USING ELECTRON BEAM APPARATUS

Patent #:	8696924	Issue Dt:	04/15/2014	Application #:	11730891	Filing Dt:	04/04/2007
Publication #:	US20070239309	Pub Dt:	10/11/2007
Title:	Polishing apparatus and polishing method

Patent #:	7863580	Issue Dt:	01/04/2011	Application #:	11760235	Filing Dt:	06/08/2007
Publication #:	US20080067377	Pub Dt:	03/20/2008
Title:	ELECTRON BEAM APPARATUS AND AN ABERRATION CORRECTION OPTICAL APPARATUS

Patent #:	7767472	Issue Dt:	08/03/2010	Application #:	11882398	Filing Dt:	08/01/2007
Publication #:	US20070287364	Pub Dt:	12/13/2007
Title:	SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Patent #:	7952071	Issue Dt:	05/31/2011	Application #:	12162071	Filing Dt:	07/24/2008
Publication #:	US20090026368	Pub Dt:	01/29/2009
Title:	APPARATUS AND METHOD FOR INSPECTING SAMPLE SURFACE

Patent #:	7883394	Issue Dt:	02/08/2011	Application #:	12184032	Filing Dt:	07/31/2008
Publication #:	US20080318503	Pub Dt:	12/25/2008
Title:	SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

Patent #:	8078306	Issue Dt:	12/13/2011	Application #:	12289507	Filing Dt:	10/29/2008
Publication #:	US20090111358	Pub Dt:	04/30/2009
Title:	POLISHING APPARATUS AND POLISHING METHOD

Patent #:	8554356	Issue Dt:	10/08/2013	Application #:	12311560	Filing Dt:	04/03/2009
Publication #:	US20100015889	Pub Dt:	01/21/2010
Title:	Processing end point detection method, polishing method,and polishing apparatus

Patent #:	8274047	Issue Dt:	09/25/2012	Application #:	12537414	Filing Dt:	08/07/2009
Publication #:	US20100032566	Pub Dt:	02/11/2010
Title:	SUBSTRATE SURFACE INSPECTION METHOD AND INSPECTION APPARATUS

Patent #:	8292694	Issue Dt:	10/23/2012	Application #:	12618033	Filing Dt:	11/13/2009
Publication #:	US20100062691	Pub Dt:	03/11/2010
Title:	SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD

Patent #:	8506362	Issue Dt:	08/13/2013	Application #:	12667891	Filing Dt:	01/06/2010
Publication #:	US20110003537	Pub Dt:	01/06/2011
Title:	POLISHING APPARATUS AND POLISHING METHOD

Patent #:	8388409	Issue Dt:	03/05/2013	Application #:	12700917	Filing Dt:	02/05/2010
Publication #:	US20100151770	Pub Dt:	06/17/2010
Title:	SUBSTRATE POLISHING APPARATUS

Patent #:	8568199	Issue Dt:	10/29/2013	Application #:	12897973	Filing Dt:	10/05/2010
Publication #:	US20110081829	Pub Dt:	04/07/2011
Title:	POLISHING ENDPOINT DETECTION APPARATUS

Patent #:	8445360	Issue Dt:	05/21/2013	Application #:	13027551	Filing Dt:	02/15/2011
Publication #:	US20110207294	Pub Dt:	08/25/2011
Title:	METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Patent #:	8641480	Issue Dt:	02/04/2014	Application #:	13036114	Filing Dt:	02/28/2011
Publication #:	US20110217906	Pub Dt:	09/08/2011
Title:	POLISHING APPARATUS AND POLISHING METHOD

Patent #:	10207390	Issue Dt:	02/19/2019	Application #:	14017620	Filing Dt:	09/04/2013
Publication #:	US20140004773	Pub Dt:	01/02/2014
Title:	PROCESSING END POINT DETECTION METHOD, POLISHING METHOD, AND POLISHING APPARATUS

Patent #:	8777694	Issue Dt:	07/15/2014	Application #:	14036321	Filing Dt:	09/25/2013
Publication #:	US20140024294	Pub Dt:	01/23/2014
Title:	POLISHING ENDPOINT DETECTION METHOD

Assignor

Exec Dt:

08/01/2018

Assignee

1-1, SHIBAURA 1-CHOME, MINATO-KU

TOKYO, JAPAN

Correspondence name and address
	WENDEROTH, LIND & PONACK, L.L.P.
	1025 CONNECTICUT AVENUE NW
	SUITE 500
	WASHINGTON, DC 20036

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