Patent Assignment Details
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| Reel/Frame: | 059379/0633 | |
| Pages: | 8 |
| | Recorded: | 03/23/2022 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17697628
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Filing Dt:
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03/17/2022
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Publication #:
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Pub Dt:
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09/22/2022
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Title:
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Nozzle Cleaning Method, Substrate Processing Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
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Assignee
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 1010045 |
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Correspondence name and address
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EDELL SHAPIRO & FINNAN LLC
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9801 WASHINGTONIAN BLVD.
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SUITE 750
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GAITHERSBURG, MD 20878
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05/16/2024 08:35 PM
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