Patent Assignment Details
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| Reel/Frame: | 059680/0197 | |
| Pages: | 19 |
| | Recorded: | 04/22/2022 | | |
| Attorney Dkt #: | 211256US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17726992
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Filing Dt:
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04/22/2022
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Publication #:
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Pub Dt:
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10/26/2023
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Title:
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Method For Improving Etch Rate And Critical Dimension Uniformity When Etching High Aspect Ratio Features Within A Hard Mask Layer
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Assignee
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TEL-EGAN, ENDERS & HUSTON LLP.
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1101 S CAPITAL OF TEXAS HWY
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BLDG. C, SUITE 200
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AUSTIN, TX 78746
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05/13/2024 02:23 PM
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