Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 060180/0565 | |
| Pages: | 8 |
| | Recorded: | 06/13/2022 | | |
| Attorney Dkt #: | TAI/3476US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/12/2024
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Application #:
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17684206
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Filing Dt:
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03/01/2022
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Publication #:
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Pub Dt:
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03/23/2023
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Title:
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND A SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Assignee
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| 1-21, SHIBAURA 3-CHOME, MINATO-KU |
| TOKYO, JAPAN 108-0023 |
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Correspondence name and address
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KIM & STEWART LLP
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111 N. MARKET ST.
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SUITE 414
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SAN JOSE, CA 95113
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04/28/2024 01:54 PM
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