Patent Assignment Details
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| Reel/Frame: | 061395/0771 | |
| Pages: | 3 |
| | Recorded: | 10/12/2022 | | |
| Attorney Dkt #: | 230259US01 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17946609
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Filing Dt:
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09/16/2022
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Publication #:
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Pub Dt:
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03/21/2024
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Title:
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METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF MATERIAL FORMED WITHIN FEATURES ON A PATTERNED SUBSTRATE
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Assignee
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TEL-EGAN, ENDERS & HUSTON LLP.
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1101 S CAPITAL OF TEXAS HWY
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BLDG. C, SUITE 200
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AUSTIN, TX 78746
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05/14/2024 01:41 AM
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