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Reel/Frame:063478/0093   Pages: 5
Recorded: 04/28/2023
Attorney Dkt #:543068US
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
05/28/2024
Application #:
18171989
Filing Dt:
02/21/2023
Publication #:
Pub Dt:
11/09/2023
Title:
IN-SITU LITHOGRAPHY PATTERN ENHANCEMENT WITH LOCALIZED STRESS TREATMENT TUNING USING HEAT ZONES
Assignors
1
Exec Dt:
03/01/2023
2
Exec Dt:
02/20/2023
3
Exec Dt:
02/22/2023
4
Exec Dt:
02/20/2023
5
Exec Dt:
03/06/2023
Assignee
1
AKASAKA BIZ TOWER
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
OBLON, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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